Cross Section Polisher

Instrument:

Cross Section Polisher

Contact:

Halvor Dolva
Jon A. Borgersen

Technology Description:

Composed of a specimen chamber that is evacuated by a turbo-molecular pump, ion source and an X an Y stage-drive specimen stage. The polisher emits an ion bean perpendicular to the specimen, and the beam cuts the specimen along the border of a shielding plate. An air isolation system and a specimen cooling system is also included. The maximum specimen size is 11mm (W) x 8mm (L) x 3mm (T).

Technical Information:

Category: Other processes Area name: Corridor O2.1A Model: IB-19520CCP Manufacturer: Jeol