Lithography - USN MST-Lab

Lithography-equipment at USN MST-Lab

• Fume Hood 4 for General Solvents
• Fume Hood 5 for corrosive chemicals
• Fume hood 7 - Corrosive
• Mask Aligner - Karl Suss MA56
• Mask Aligner EVG 620
• Maskless aligner
• Rinse and dry STI Semitool
• Spinner 1 Semitool 1
• Spinner 2 AB Plast Spin 150
• Spinner, Spin 150i
• Wet Etching AB Plast