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USN MST-Lab
Lithography - USN MST-Lab
Lithography-equipment at USN MST-Lab
Fume Hood 4 for General Solvents
Fume Hood 5 for corrosive chemicals
Fume hood 7 - Corrosive
Mask Aligner - Karl Suss MA56
Mask Aligner EVG 620
Maskless aligner
Rinse and dry STI Semitool
Spinner 1 Semitool 1
Spinner 2 AB Plast Spin 150
Spinner, Spin 150i
Wet Etching AB Plast