Instrument: |
Plasma Cleaners |
Contact: |
MiNaLab@sintef.no |
Sample Specifications: |
100 mm and 150 mm Si wafers
SINTEF MiNaLab has two very similar systems, one with less material restrictions than the other. |
Technology Description: |
A tool using microwave oxygen plasma to remove organics on the surfaces. High frequency applied in a vacuum chamber activates gas molecules and atoms. This allows organic deposits to be removed in a dry process.Typical processes:
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Technical Information: |
Power: 1000 W Frequency: 2.45 GHz Process pressure: approx. 0.2 – 2 mbar Gas : O2 |
