Instrument: |
Ovens for Lithography Processes |
Contact: |
Mark Chiappa
Svenn Ove Linde |
Technology Description: |
These ovens are for soft/hard baking in lithography processes. There is one oven in the lithography area and one in the student lab. Maximum temperature 200°C. No licence is needed. |
Technical Information: |
Category: Lithography Area name: Lithography & Wet Etch Model: U26 Manufacturer: Memmert |
