Instrument: |
Nanoimprinter SCIL |
Contact: |
Mark Chiappa
Ken Roger Ervik |
Technology Description: |
SCIL (Substrate Conformal Imprint Lithography) is a technique for large area imprint. We use a PDMS replica made from a master mold which is bonded to a piece of thin glass as a working stamp. At NanoLab we have all the tooling to make stamps up to 6”.
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Technical Information: |
Category: Lithography Area name: Lithography & Wet Etch Model: SCIL Manufacturer: Karl Süss |
