Instrument: |
Chemical stations in lito area |
Contact: |
Mathilde Barriet
Mark Chiappa |
Technology Description: |
Fumehoods and perforated lab benches for lithography related processes, such as wet etching, lift-off and development. Ultrasonic baths, temperated baths, resist spinners, dry spinner, quartz bath and hot plates are available. One bench is designated to HF etching only. |
Technical Information: |
Category: Lithography Area name: Lithography & Wet Etch Model: PM Plast Manufacturer: PM Plast |
