LIMS
UiO
NTNU
USN
Home
Technologies
Thermal processes
Thin film deposition
Lithography
Dry etching
Characterisation
Bonding and packaging
Chemical and biological methods
Sample preparation
Other
Events
Lab facilities
NTNU NanoLab
UiO MiNaLab
SINTEF MiNaLab
USN MST-Lab
About Norfab
Access and Support
Contact
Norwegian Micro - and Nano Fabrication Facility
>
Technologies
>
Lithography
>
NTNU NanoLab
Lithography - NTNU NanoLab
Lithography-equipment at NTNU NanoLab
Chemical stations in lito area
EBL Elionix
Mask Aligner MJB3
Maskaligner MA6
MLA 100
MLA 150
Nanoimprinter SCIL
Ovens for Lithography Processes
SCIL Replication tool
Yellow Light Microscope