Lithography - NTNU NanoLab

Lithography-equipment at NTNU NanoLab

• Chemical stations in lito area
• EBL and SEM area slot 1
• EBL and SEM area slot 2
• EBL Elionix
• EBL Elionix workstation
• Lithography area slot 1
• Mask Aligner MJB3
• Maskaligner MA6
• MLA 100
• MLA 150
• Nanoimprinter SCIL
• Ovens for Lithography Processes
• SCIL Replication tool
• Yellow Light Microscope