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Norwegian Micro - and Nano Fabrication Facility
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Lithography
Lithography
Standard photolithography, soft lithography, e-beam lithography (EBL) and nanoimprinting
USN MST-Lab
Fume Hood 4 for General Solvents
Fume Hood 5 for corrosive chemicals
Fume hood 7 - Corrosive
Mask Aligner - Karl Suss MA56
Mask Aligner EVG 620
Maskless aligner
Rinse and dry STI Semitool
Spinner 1 Semitool 1
Spinner 2 AB Plast Spin 150
Spinner, Spin 150i
Wet Etching AB Plast
NTNU NanoLab
Chemical stations in lito area
EBL Elionix
Mask Aligner MJB3
Maskaligner MA6
MLA 100
MLA 150
Nanoimprinter SCIL
Ovens for Lithography Processes
SCIL Replication tool
Yellow Light Microscope
UiO MiNaLab
Mask aligner 2
Resist spinner
Tabletop Maskless Litography/Aligner System
SINTEF MiNaLab
Coater, Gyrset RC8
Mask Aligner MA150 KWS
Mask Aligners MA150e
Plasma Cleaners
Resist Coater ACS200
Resist Coater Maximus