RTP Allwin 2 Inorganic


RTP Allwin 2 Inorganic


Mathilde Barriet
Martijn de Roosz

Technology Description:

The AccuThermo AW 610 is a rapid thermal processing (RTP) system, which uses high intensity visible radiation to heat single wafers for short periods of time at precisely controlled temperatures. The process periods are typically 1 to 600 sec in duration.

This is not a furnace and can not handle high temperature for a long period of time.

Max time for typical temp:

500C up to 25 min

700C up to 10 min

900C up to 3 min

1100up to 1 min

Technical Information:

Category: Thermal processes Area name: Chemical area Model: AW610 Manufacturer: ALLWIN21