Instrument: |
RTP Allwin 1 Organic |
Contact: |
Mathilde Barriet
Martijn de Roosz |
Technology Description: |
The AccuThermo AW 610 is a rapid thermal processing (RTP) system, which uses high intensity visible radiation to heat single wafers for short periods of time at precisely controlled temperatures. The process periods are typically 1 to 600 sec in duration. This is not a furnace and can not handle high temperature for a long period of time. Max time for typical temp: 500C up to 25 min 700C up to 10 min 900C up to 3 min 1100up to 1 min |
Technical Information: |
Category: Thermal processes Area name: Chemical area Model: AW610 Manufacturer: Allwin21 |
RTP Allwin 1 Organic
