High temperature processes including RTP, thermal deposition and doping
Thermal processes
USN MST-Lab
- Climate Cabinet (Weiss)
- Climate test chamber
- CNT-reactor
- Cryofreezer
- High temperature furnace
- Oven Binder MB6
- Oxidation Oven Harmbridge HiTech furnace
- Post Cure Chamber
- Temp chamber Heraeus Kendro
- Temp Chamber Heraeus Kendro
- Temp chamber Lenton 202
- Temperature Shock chamber
- Thermal Chamber Heraeus T6200
- Thermal Chamber Lenton WHT6/30
- Thermal Chamber Thermaks TS4115
- Thermal Chamber, Heraeus Wötsch
- Thermoshaker TS-100
- Tube furnace 2" (new), GSL-1100X-S
- Tube Furnace High Temperature 2"
