High temperature processes including RTP, thermal deposition and doping
Thermal processes
USN MST-Lab
- Climate Cabinet (Weiss)
- Climate test chamber
- CNT-reactor
- Cryofreezer
- High temperature furnace
- Oven Binder MB6
- Oxidation Oven Harmbridge HiTech furnace
- Post Cure Chamber
- Temp chamber Heraeus Kendro
- Temp Chamber Heraeus Kendro
- Temp chamber Lenton 202
- Temperature Shock chamber
- Thermal Chamber Heraeus T6200
- Thermal Chamber Lenton WHT6/30
- Thermal Chamber Thermaks TS4115
- Thermal Chamber, Heraeus Wötsch
- Thermoshaker TS-100
- Tube furnace 2" (new), GSL-1100X-S
- Tube Furnace High Temperature 2"
UiO MiNaLab
- 3-zone furnace
- Big blue tube furnace
- Birkeland Tube furnace
- Flextura - Annealing chamber
- Lindberg Tube furnace
- Rapid Thermal Processing - Micro
- Rapid Thermal Processing - One
- Small blue tube furnace
- Tube 1 - 4-stack furnace
- Tube 2 - 4-stack furnace
- Tube 3 - 4-stack furnace
- Tube 4 - 4-stack furnace
- Warm cabinet
