Moorfield – DC/RF Magnetron sputter

Instrument:

Moorfield - DC/RF Magnetron sputter

Contact:

Vegard Skiftestad Olsen
Halvor Dolva

Technology Description:

Type: Moorfield

Source: 1 DC: and 2 RF

Target: 3 x 3'' 

Targets available: Al, ZnO, SiO2. More targets are available on request.

Gas: Argon and Nitrogen

Technical Information:

Category: Thin film deposition Area name: Clean Room Room area: 440 Model: MiniLab Manufacturer: Moorefield