Thermal evaporator

Instrument:

Thermal evaporator

Contact:

Heine Nygard Riise
Viktor Bobal

Technology Description:

Material Class:

Vacuumcompatible solids

Technology Description:

 

Conventional thermal evaporation chamber for resistive heating and evaporation of metals onto a target. The e-beam evaporator at UiO MiNaLab can only deposit one metal during one cycle.

Technical Information:

Type: Balzers BAE 250 coating system

Ultimate vacuum: 1 x 10-6 mbar.

Metals: Al, Au, Ag, Ni, Zn, Sn, In

 

Technical Information:

Category: Thin film deposition Area name: Clean Room Room area: 440 Model: BAE 250 Manufacturer: Balzers