Instrument: |
Piezoflare 800 from SolMateS |
Contact: |
Thor.Bakke@sintef.no |
Booking: |
MiNaLab@sintef.no |
Sample Specifications: |
100, 150, and 200 mm wafers (Si and other)
|
Technology Description: |
SolMateS thin film process equipment is based on pulsed laser ablation. A high power laser is used to evaporate material from a target. Subsequently the vaporized material condenses on a wafer or substrate. The current PiezoFlare platform allows deposition on wafers or substrates up to Ø200mm. |
Technical Information: |
The PiezoFlare 800 is a manually operated PLD system.This equipment can hold up to 4 different targets and can process any wafer or substrate size below a diameter of 200 mm (or 150 mm square). |
