Carbon Coater for SEM Sample Prep.

Instrument:

Carbon Coater for SEM Sample Prep.

Contact:

Ken Roger Ervik
Svenn Ove Linde

Technology Description:

This carbon coater is used to produce extremely thin carbon layers on non-conducting samples. Suitable to reduce charging for S(T)EM imaging and EDX-analysis. Coating thickness is controlled by a thickness controller.

Sample Specifications:    

5” wafers are the maximum size that will fit in the chamber.

Technical Information:

Category: Deposition Area name: Characterisation Model: 208 Carbon Manufacturer: Cressington