Thin film deposition - NTNU NanoLab

Thin film deposition-equipment at NTNU NanoLab

• ALD
• Carbon Coater for SEM Sample Prep.
• CVD
• Dip Coater
• E Beam evaporator & Sputter AJA
• E Beam Evaporator - K.J. Lesker
• E-Beam Evaporator - Pfeiffer
• Electroplating System
• PECVD
• Pheiffer room
• Sputter Coater and Thermal Evaporator
• Sputter Coater for SEM Sample Prep.
• Thin film area slot 1