Thin film deposition - NTNU NanoLab

Thin film deposition-equipment at NTNU NanoLab

• AJA Sputter and Evaporator
• ALD
• Carbon Coater for SEM Sample Prep.
• CVD
• Dip Coater
• E-Beam Evaporator
• PECVD
• Sputter Coater and Thermal Evaporator
• Sputter Coater for SEM Sample Prep.