Sputter AJA

Instrument:

Sputter AJA

Contact:

Kaiying Wang
Anh Tuan Thai Nguyen

Technology Description:

TARGETS FOR SPUTTRING : Au, Ti 90 W10 wt%, Ti10W90 wt%, Cu, SiO2.

TARGETS FOR E- BEAM:  Ti, Ni,Cr.

Technical Information:

Category: Thin film deposition Area name: Cleanroom Room area: 500 Model: ATC 20x20x30 Manufacturer: AJA International Inc.