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Norwegian Micro - and Nano Fabrication Facility
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Thin film deposition
Thin film deposition
Thin film deposition of metals, TCO’s, poly-Si, nitrides and more
USN MST-Lab
Au sputter VG Microtech SC500
Electroplating Ni
Electroplating of Cu and Sn
Fume Hood 6- Au electroplating, Ti etch
Laminar flow bench 4 Metal finger
Plasma Cleaner Addax
Profilometer DEKTAK 150
Sputter AJA
Thermal Evaporator Moorfield MiniLab T25M
NTNU NanoLab
AJA Sputter and Evaporator
ALD
Carbon Coater for SEM Sample Prep.
CVD
Dip Coater
E-Beam Evaporator
PECVD
Sputter Coater and Thermal Evaporator
Sputter Coater for SEM Sample Prep.
UiO MiNaLab
Angstrom - E-beam and thermal PVD
Atomic layer deposition (ALD)
DC Magnetron sputtering
Leybold E-beam evaporation
Moorfield - DC/RF Magnetron sputter
MOVPE / MOCVD
NanoPVD - DC/RF Magnetron sputter
PECVD
Semicore - DC/RF Magnetron sputter
Thermal evaporator
SINTEF MiNaLab
Automatic CSD PZT deposition
PECVD
Pulsed laser deposition
Sputter for Al Ti TiN and W
Sputter for Au, NiCr, TiW, Al, Ti, and Pt
