Thin film deposition of metals, TCO’s, poly-Si, nitrides and more
Thin film deposition
UiO MiNaLab
- Angstrom - E-beam and thermal PVD
- Atomic layer deposition (ALD)
- Flextura - Magnetron sputtering chamber
- Flextura - Remote plasma chamber
- Leybold E-beam evaporation
- Moorfield - DC/RF Magnetron sputter
- MOVPE / MOCVD
- NanoPVD - DC/RF Magnetron sputter
- PECVD
- Semicore - DC/RF Magnetron sputter
- Thermal evaporator
