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Norwegian Micro - and Nano Fabrication Facility
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Technologies
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Thin film deposition
Thin film deposition
Thin film deposition of metals, TCO’s, poly-Si, nitrides and more
USN MST-Lab
Au sputter VG Microtech SC500
Electroplating Ni
Electroplating of Cu and Sn
Fume Hood 6- Au electroplating, Ti etch
Laminar flow bench 4 Metal finger
Plasma Cleaner Addax
Profilometer DEKTAK 150
Sputter AJA
Thermal Evaporator Moorfield MiniLab T25M
NTNU NanoLab
ALD
Carbon Coater for SEM Sample Prep.
CVD
Dip Coater
E Beam evaporator & Sputter AJA
E Beam Evaporator - K.J. Lesker
E-Beam Evaporator - Pfeiffer
PECVD
Sputter Coater and Thermal Evaporator
Sputter Coater for SEM Sample Prep.
UiO MiNaLab
Angstrom - E-beam and thermal PVD
Atomic layer deposition (ALD)
DC Magnetron sputtering
Leybold E-beam evaporation
Moorfield - DC/RF Magnetron sputter
MOVPE / MOCVD
NanoPVD - DC/RF Magnetron sputter
PECVD
Semicore - DC/RF Magnetron sputter
Thermal evaporator
SINTEF MiNaLab
Automatic CSD PZT deposition
PECVD
Pulsed laser deposition
Sputter for Al Ti TiN and W
Sputter for Au, NiCr, TiW, Al, Ti, and Pt
