Probe Station PWS Probe II

Instrument:

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Technology Description:

The semi-automatic probe tester, PWS Probe II, has a motorized chuch for x-y motion and theta rotation stepwise or continuous. The microscope has a zoom in possibility and large movement possibility in the z direction (focus). The probe station may be equipped with probe-cards or until four Suss Microtech PH100 probers for  x-y-z adjustment. The platform is also adjustable in z-direction.  For IV measurements, a 2 channel power supply, Keithley 2602, is used.

PII Specifications:

• Stage Travel:  (6.8 in. X) (10.5 in. Y)
• Theta Rotation:  +/- 7.5 degrees
• Chuck Planarization:  +/- .0005 inches
• Stage Accuracy:  +/- .00025 inches
• Stage Resolution:  .0001 inch
• Scanning Speed*:  5 inches/second.
• Repeatability:  +/- .05 mils.

Technical Information: