Probe station

Instrument:

Probe station

Contact:

Viktor Bobal

Technology Description:

Technology Description:

This semi-automatic system has four probes and the ability to measure currents down to the pA-range. It may handle wafers up to 8” in size and has a reproducibility of ±4µm. This programmable system may be used for efficient electrical characterization (like CV and IV) on the wafer level.

Technical Information:

Type: Pegasus S200FA. Wentworth Laboratories

Agilent 4284A precision LCR meter (20Hz- 1MHz)

Keithley 617 programmable electrometer

Keithley 2440 5A Sourcemeter

Technical Information:

Category: Characterization Area name: Characterization room Model: Pegasus S200FA Manufacturer: Wentworth Laboratories