Ellipsometer

Instrument:

Ellipsometer

Contact:

Kristin Bergum
Viktor Bobal

Technology Description:

Material Class:

Transparent solids

Technology Description:

Ellipsometry can probe the complex refractive index or dielectric function tensor, which gives access to fundamental physical parameters and is related to a variety of sample properties. It is commonly used to characterize film thickness for single layers or complex multilayer stacks ranging from a nanometers to several micrometers.

Technical Information:

Type: Woolam Alpha SE.

Spectral range: 380 - 900 nm.

Angle of incidence: 65º, 70º, 75º, or 90º.

Data accousition rates: 3 sec (Fast mode), 10 sec (Standard mode), 30 sec (High precision mode).

Beam diameter: ~3mm.

Technical Information:

Category: Characterization Area name: Clean Room Room area: 440 Model: AlphaSE Manufacturer: Woolam