Alexander Azarov
Viktor Bobal

Technology Description:

Rutherford Backscattering Spectrometry (RBS) is an analytical technique based on the measuring of number and energy distribution of fast (1-3 MeV) light ions backscattered from the target. Conventional applications of this technique are the compositional thin film analysis and determination of impurity depth distributions (specifically for heavy elements in light matrix). RBS in combination with channeling provides a possibility for analysis of structural quality of crystalline materials.

The home-made RBS system at UiO MiNaLab is based on 1 MeV NEC Tandem accelerator and 0.5-2 MeV H, Li and He ions can be used as an analyzing beam.

Elements detected: B-U

Depth of analysis < 1mm

Detection limits: 0.001 -10at% (depending on combination of elements in the sample analyzed)

Depth resolution: 5-20 nm


Quantitative without standards

Vacuum compatible materials

Sample measurements:

It is not possible to apply for a license to the RBS-instrument. This is an instrument which require a dedicated operator. Please contact Alexander Azarov by email to have samples measured. alexander.azarov@smn.uio.no

Technical Information:

Category: Characterization Area name: Clean Room Room area: 440 Model: - Manufacturer: Custom made