Instrument: |
FEI Quanta FEG 600 with EDAX |
Contact: |
Anand.Summanwar@sintef.no |
Booking: |
MiNaLab@sintef.no |
Sample Specifications: |
100 mm and 150 mm silicon wafers
Conducting samples are preferred. |
Technology Description: |
State of the art field emission microscope that allows nanometer level inspection of up to 150 mm wafers and other samples. The electron microscope images a sample by scanning it with a high-energy beam of electrons in a raster scan pattern. The electrons interact with the sample producing signals that contain information about the sample’s surface topography, composition, and other properties such as electrical conductivity. |
Technical Information: |
Quanta FEG 600 from FEI Company:
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