Instrument: |
KLA/Tencor AlphaStep 500 Profilometer |
Contact: |
MiNaLab@sintef.no |
Booking: |
MiNaLab@sintef.no |
Sample Specifications: |
100 mm and 150 mm Si and glass wafers
|
Technology Description: |
The profilometer (also called alpha stepper) is a measuring instrument used to measure a surface’s profile, in order to quantify its roughness or to measure cavities. A stylus is moved in contact mode over a surface measuring the sample topography. Vertical resolution is usually in the nm level, though lateral resolution is usually poorer. |
Technical Information: |
Step heights: 50 nm – 300 µm |
