Interferometer

Instrument:

Contact:

Booking:

Sample Specifications:

All shapes from small wafer pieces and devices up to 150 mm Si wafers

• Most cleanroom compatible materials allowed (with some exceptions)
• Various surfaces: opaque, transparent, coated, uncoated, specular, and nonspecular

Technology Description:

White light interferometry, also known as coherence scanning interferometry or vertical scanning interferometry (VSI), is used to produce high quality three-dimensional surface maps. For characterizing and quantifying surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy. All measurements are nondestructive, fast, and require no sample preparation. Dynamical characterization of MEMS is also available.

Technical Information:

Vertical resolution: 0.1 nm, independent of surface texture, magnification or feature height

Vertical measurement range: 0.1nm to 15mm

Objectives: 1x, 5x, 5x GC (Glass Compensated), 20x, 50x and 100x

Field-of-View: Selectable from 0.04 to 14 millimeters; larger area imaged with field stitching

High speed camera resolution: 640 x 480 pixel
Scan rate: 14 µm/s
Scanner: Closed-loop piezo-based

Stage travel: 150 mm

Transparent films: 1-50 µm

DMEMS: Dynamical measurements, 10MHz, 200V amp