Instrument: |
ACCRETECH (Tokyo Seimitsu Kogaku) A-PM-90A |
Contact: |
Niaz.Ahmed@sintef.no
Lars.G.W.Tvedt@sintef.no |
Booking: |
MiNaLab@sintef.no |
Sample Specifications: |
100 mm and 150 mm Si wafers
|
Technology Description: |
The TSK A-PM-90A is an automatic probing station for electrical characterization – on wafer level. Loading of wafers is done by robots from cassettes. Manual loading is also possible. Two nearly identical machines are installed at SINTEF MiNaLab. |
Technical Information: |
Fully automatic wafer probing machine
|
