Instrument: |
August Technology NSX95 |
Contact: |
Niaz.Ahmed@sintef.no |
Booking: |
MiNaLab@sintef.no |
Sample Specifications: |
100 mm and 150 mm Si wafers
|
Technology Description: |
Automatic wafer inspection to detect micro defects (typically 0.5 µm and larger). |
Technical Information: |
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