4-point Probe

Instrument:

Contact:

Booking:

Sample Specifications:

100 mm and 150 mm Si wafers

• Si/SiO₂/Si_xN_y
• Al/W/Ti
• Glass (with exceptions)
• Polymers (with exceptions)
• Noble metals (with exceptions)

Technology Description:

4-point probes method is an electrical impedance measuring technique that uses separate pairs of current-carrying and voltage-sensing electrodes to make more accurate measurements than traditional two-terminal (2T) sensing. 4T sensing is used in some ohmmeters and impedance analyzers, and in precision wiring configurations for strain gauges and resistance thermometers. 4-point probes are also used to measure sheet resistance of thin films.