Instrument: |
JEOL SEM |
Contact: |
Amin Hossein Zavieh
Ken Roger Ervik |
Technology Description: |
Operator service is possible, or a demo session with your sample. Please contact nanolab@ntnu.no for this. The JSM-6480LV is a mid-range, scanning electron microscope (SEM) with a tungsten filament. Resolution of 4.0 nm @ 30 kV Sample size: Up to 8" wafers possible The low vacuum mode, allows for observation of specimens which cannot be viewed at high vacuum due to excessive water content or due to a non-conductive surface. |
Technical Information: |
Category: Characterization Area name: Supporting Labs Model: JSM-6480LV Manufacturer: JEOL |
