3D Optical Profiler


3D Optical Profiler


Amin Hossein Zavieh
Verner Håkonsen

Technology Description:

The 3D optical profiler is a characterization tool that allows for rapid, non-destructive imaging of your sample surface by utilizing white light interferometry (WLI). Surface roughness, step height and film thickness are a few of the parameters that you can achieve.

The vertical resolution is sub 1 nm, and lateral resolution depends on the objective used. The optical profiler is equipped with 2.5x, 20x and 50x objective lenses, and with 0.55x and 2x zoom lenses.

Measurement techniques available are Vertical Scanning Interferometry (VSI/VXI) and Phase Shifting Interferometry (PSI).

Sample size: If it fits under a light microscope, it fits under the optical profiler.


Technical Information:

Category: Characterization Area name: EBL and SEM Model: Contour GT -K Manufacturer: Bruker