LIMS
High temperature processes including RTP, thermal deposition and doping
Thin film deposition of metals, TCO’s, poly-Si, nitrides and more
Standard photolithography, soft lithography, e-beam lithography (EBL) and nanoimprinting
Reactive ion etching and ion beam etching
A variety of characterisation equipment for research and process control
Back-end processing including dicing, flip chip bonding and pick and place
Full chemical synthesis, PDMS-microfluidic systems
Plasma cleaners, grinding machines and more
