Status of Pulsed Laser Deposition tool at SINTEF MiNaLab
May 5, 2014

The PiezoFlare 800 tool from SolMateS was installed at SINTEF MiNaLab in early 2013. After an installation and testing period the first wafers with PZT came out of the tool in August 2013. The PiezoFlare 800 is a manually operated, single wafer PLD system. Since the system was installed and till March 2014, the tool has deposited over 140 wafers with PZT layers of 1 and 2 um thickness. SolMateS and SINTEF are in a strong collaboration to further optimize this process for various PiezoMEMS applications.