New Probe Station at UiO MiNaLab
March 19, 2014

In February a new Probe Station was installed at UiO MiNaLab – a Pegasus S200FA delivered by Wentworth Laboratories. This semi-automatic system has four probes and the ability to measure currents down to the pA-range. It may handle wafers up to 8” in size and has a reproducibility of ±4µm. This programmable system may be used for efficient electrical characterization (like CV and IV) on the wafer level.

The system will be available through NorFab and is situated in UiO MiNa-Lab, however, outside the cleanroom facilities.

If you have any questions, please contact: norfab-minalab@smn.uio.no