Endura Cluster tool installed at SINTEF MiNaLab

Endura HP PVD Tool Fully Operational At MiNaLab
December 8, 2015

The tool, manufactured by Applied Materials, was purchased used and has been fully refurbished and CE certified.

Installation, process development and qualification for all currently available targets has been completed. The tool now supplies high quality and batch-to-batch reproducible thin films of Au, TiW, NiCr, Al on “non-CMOS” compatible substrates. Of special importance for the piezoMEMS-production at SINTEF MiNaLab is the capability to provide Ti and Pt-thin films on substrates in-house, and the future possibility to also provide piezoelectric thin films of AlN.


Users may visit the tool page at www.NorFab.no/”Sputter for Au, NiCr, TiW, Al, Ti, and Pt” for details and booking.