Endura HP PVD tool being installed at SINTEF MiNaLab

Endura HP PVD tool at MiNaLab
January 28, 2015

The tool, manufactured by Applied Materials, has been purchased used and has been fully refurbished and CE certified.

Installation  is not quite finished, and process development and qualification for all targets will likely require a lot of work still. Soon we expect that the tool will supply high quality and batch-to-batch reproducible thin films of Au, TiW, NiCr, Al on “non-CMOS” compatible substrates. Of special importance for the piezoMEMS-production at SINTEF MiNaLab is the capability to provide Pt-thin films on substrates in-house, and the future possibility to also provide piezoelectric thin films of AlN.