Location: between Tønsberg and Horten, 100 km south of Oslo
Cleanroom size: 400 m²
The MST-Lab is a flexible cleanroom facility for MEMS processes on silicon wafers and other substrates with emphasize on bonding, packaging and Micro-System-Technology. Therefore the laboratory also contains advanced tools for testing, dicing, pick and place, fine-pitch wire bonding and different flip chip methods. In addition, IMST has laboratories for: material preparation and characterization, microsystem measurements (electrically and optically) and BioMEMS research like assembly, packaging and testing of lab-on-chip and microfluidic microsystems.
Website
USN MST-Lab
