Location: between Tønsberg and Horten, 100 km south of Oslo
Cleanroom size: 400 m²
The MST-Lab is a flexible cleanroom facility for MEMS processes on silicon wafers and other substrates with emphasize on bonding, packaging and Micro-System-Technology. Therefore the laboratory also contains advanced tools for testing, dicing, pick and place, fine-pitch wire bonding and different flip chip methods. In addition, IMST has laboratories for: material preparation and characterization, microsystem measurements (electrically and optically) and BioMEMS research like assembly, packaging and testing of lab-on-chip and microfluidic microsystems.
Website
USN MST-Lab
Technologies and equipment at USN MST-Lab
Thermal processes
- Climate Cabinet (Weiss)
- Climate test chamber
- CNT-reactor
- Cryofreezer
- Freeze-drier
- High temperature furnace
- Oven Binder 961
- Oven Binder 961
- Oven Binder MB6
- Oven Termaks
- Oxidation Oven Harmbridge HiTech furnace
- Post Cure Chamber
- Temp chamber Heraeus Kendro
- Temp Chamber Heraeus Kendro
- Temp chamber Lenton 202
- Temperature Shock chamber
- Thermal Chamber Heraeus T6200
- Thermal Chamber Lenton WHT6/30
- Thermal Chamber Thermaks TS4115
- Thermal Chamber, Heraeus Wötsch
- Thermoshaker TS-100
- Tube furnace 2″ (new), For Annealing only !
- Tube Furnace High Temperature 2″
Thin film deposition
Lithography
Dry etching
Characterisation
- Acoustic material characterisation
- Acoustic Pulse-Echo measurements
- AFM XE-200
- Elipsometer
- Gas chromatograph,Shimadzu
- Hall Instrument
- He- Leak Detector
- Impedance measurement
- Interferometer Wyko NT9100
- Optical Microscope I Leica DM4000M
- Optical Microscope II Neophot 32
- Optical microscope Leica DM3 XL
- Optical Microscope Olympus IX51/TH4-200
- Optical Microscope Olympus MVX10
- Probe Station PWS Probe II
- Probe station RF
- Probe Station, Pasific Western
- Probestation Cryo, Lakeshore
- SAM 300, PVA TePLA
- Scanning tank, Onda
- SEM Hitachi SU 3500
- SEM Hitachi SU 8230
- Spectrofluorometer FS5
- XRD
Bonding and packaging
- Ball bonder – TPT HB100
- Bond pull tester Micropull
- Critical Point Dryer
- Die Attach Laurier Inc.
- Die Bonder, TPT
- Flip-chip bonder FinePlacer Pico (Automatic Force 2-700 N)
- Flip-chip bonder FinePlacer Pico (Manual Force 1-40 N)
- IR-Camera Pixelink PL-B74EF
- Optical Microscope, Zeiss V12
- Shear tester Delvotec 5600
- Ultrasonic bath FB15051
- Ultrasonic Cleaning Brandson
- Vacuum packer
- Vacuum welder, Budatec
- Wafer Bonding System EVG 501
- Wire bonder (Ball)
- Wire Bonder (Ball) Delvotec 5610
- Wire bonder(wedge), TPT
- Wirebonder (Ball) manual Delvotek5410
Chemical and biological methods
- Autoclave
- Biological Safety Cabinet 2 BIO
- Biological Safety Cabinet 3 BIO
- Centrifuge Eppendorf 5702R
- Centrifuge MiniSpin
- Cleaner BioTek ELX50
- Consort Multi-parameter analyser
- Dispencer Chemyx Micro Syringe pump 1
- Edvocycler
- Electrochemical workstation
- Elektro Chemical workstation
- Elektro Phoresis
- Elektro Phoresis
- Fume Hood 1- BIO
- Fume Hood 2 -BIO
- Fume Hood 3- BIO
- Fumehood nr 8 for Gold etching
- Incubator Binder CB150
- Incubator Labnet
- Incubator, Orbital shaker
- Laminar flow bench 1 BIO
- Reader 1 Tecan Spectra Fluor
- Reader 2 Bio Tek Synergy2
- StepOnePlus real-time PCR
- UV Photospectrometer, Shimadzu
