Location: between Tønsberg and Horten, 100 km south of Oslo
Cleanroom size: 400 m²
The MST-Lab is a flexible cleanroom facility for MEMS processes on silicon wafers and other substrates with emphasize on bonding, packaging and Micro-System-Technology. Therefore the laboratory also contains advanced tools for testing, dicing, pick and place, fine-pitch wire bonding and different flip chip methods. In addition, IMST has laboratories for: material preparation and characterization, microsystem measurements (electrically and optically) and BioMEMS research like assembly, packaging and testing of lab-on-chip and microfluidic microsystems.
Website
USN MST-Lab
Technologies and equipment at USN MST-Lab
Thermal processes
- Climate Cabinet (Weiss)
- Climate test chamber
- CNT-reactor
- Cryofreezer
- High temperature furnace
- Oven Binder MB6
- Oxidation Oven Harmbridge HiTech furnace
- Post Cure Chamber
- Temp Chamber Heraeus Kendro
- Temp chamber Heraeus Kendro
- Temp chamber Lenton 202
- Temperature Shock chamber
- Thermal Chamber Heraeus T6200
- Thermal Chamber Lenton WHT6/30
- Thermal Chamber Thermaks TS4115
- Thermal Chamber, Heraeus Wötsch
- Thermoshaker TS-100
- Tube Furnace High Temperature 2″
Thin film deposition
Lithography
Dry etching
Chemical and biological methods
- Autoclave
- Biological Safety Cabinet 2 BIO
- Biological Safety Cabinet 3 BIO
- Centrifuge Eppendorf 5702R
- Centrifuge MiniSpin
- Cleaner BioTek ELX50
- Consort Multi-parameter analyser
- Dispencer Chemyx Micro Syringe pump 1
- Edvocycler
- Electrochemical workstation
- Elektro Chemical workstation
- Elektro Phoresis
- Elektro Phoresis
- Fume Hood 1- BIO
- Fume Hood 2 -BIO
- Fume Hood 3- BIO
- Incubator Binder CB150
- Incubator Labnet
- Incubator, Orbital shaker
- Laminar flow bench 1 BIO
- Plate Reader, Multidetection Bio Tek Synergy 2 SLFA
- Reader 1 Tecan Spectra Fluor
- Reader 2 Bio Tek Synergy2
- StepOnePlus real-time PCR
- UV Photospectrometer, Shimadzu
