Ovens for Lithography Processes

Instrument:

Ovens for Lithography Processes

Contact:

Mark Chiappa
Svenn Ove Linde

Technology Description:

These ovens are for soft/hard baking in lithography processes. There is one oven in the lithography area and one in the student lab. Maximum temperature 200°C. No licence is needed.

Technical Information:

Category: Lithography Area name: Lithography & Wet Etch Model: U26 Manufacturer: Memmert