Nanoimprinter SCIL

Instrument:

Nanoimprinter SCIL

Contact:

Mark Chiappa
Ken Roger Ervik

Technology Description:

SCIL (Substrate Conformal Imprint Lithography) is a technique for large area imprint. We use a PDMS replica made from a master mold which is bonded to a piece of thin glass as a working stamp.  At NanoLab we have all the tooling to make stamps up to 6”.

 

Technical Information:

Category: Lithography Area name: Lithography & Wet Etch Model: SCIL Manufacturer: Karl Süss