Chemical stations in lito area

Instrument:

Chemical stations in lito area

Contact:

Mathilde Barriet
Mark Chiappa

Technology Description:

Fumehoods and perforated lab benches for lithography related processes, such as wet etching, lift-off and development. Ultrasonic baths, temperated baths, resist spinners, dry spinner, quartz bath and hot plates are available. One bench is designated to HF etching only.

Technical Information:

Category: Lithography Area name: Lithography & Wet Etch Model: PM Plast Manufacturer: PM Plast