4-point Probe

Instrument:

Veeco FPP5000

Contact:

MiNaLab@sintef.no

Booking:

MiNaLab@sintef.no

Sample Specifications:

100 mm and 150 mm Si wafers

  • Si/SiO2/SixNy
  • Al/W/Ti
  • Glass (with exceptions)
  • Polymers (with exceptions)
  • Noble metals (with exceptions)

Technology Description:

4-point probes method is an electrical impedance measuring technique that uses separate pairs of current-carrying and voltage-sensing electrodes to make more accurate measurements than traditional two-terminal (2T) sensing. 4T sensing is used in some ohmmeters and impedance analyzers, and in precision wiring configurations for strain gauges and resistance thermometers. 4-point probes are also used to measure sheet resistance of thin films.