JEOL SEM

Instrument:

JEOL SEM

Contact:

Ken Roger Ervik
Ida Noddeland

Technology Description:

Operator service is possible, or a demo session with your sample. Please contact nanolab@ntnu.no for this.

The JSM-6480LV is a mid-range, scanning electron microscope (SEM) with a tungsten filament.

Resolution of 4.0 nm @ 30 kV 

Sample size: Up to 8" wafers possible

The low vacuum mode, allows for observation of specimens which cannot be viewed at high vacuum due to excessive water content or due to a non-conductive surface. 

Technical Information:

Category: Characterization Area name: Supporting Labs Model: JSM-6480LV Manufacturer: JEOL